Secondary Ion Mass Spectrometry and Its Application to Materials Science, 2nd Edition

In this edition of Secondary Ion Mass Spectrometry and Its Application to Material Science the authors expand further on the principles and methods presented in the first edition. A more detailed overview of the principles of SIMS is given, and of how the development of dual-beam instruments has blurred the traditional fields of dynamic and static SIMS to enable greater analytical possibilities. In particular, the development and application of cluster ion beams, and how this has opened up a new area of materials analysis. Practical information on how to obtain high quality SIMS data, and what parameters should be used to define this are also considered.

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